Surface Structure Formed by the Reaction of Monomethylgermane on Si(001) Surface

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-03, Vol.47 (3R), p.1690
Main Authors: Yasui, Kanji, Kanemaru, Tetsushi, Ogiwara, Tomoaki, Nishiyama, Hiroshi, Inoue, Yasunobu, Akahane, Tadashi, Takata, Masasuke
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.1690