Characterization of Sensitivity and Resolution of Silicon Resistive Probe

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-03, Vol.47 (3R), p.1717
Main Authors: Kim, Junsoo, Lee, Jaehong, Song, Ickhyun, Lee, Jong Duk, Park, Byung-Gook, Hong, Seungbum, Ko, Hyoungsoo, Min, Dong-Ki, Park, Hongsik, Park, Chulmin, Jung, Juhwan, Shin, Hyungcheol
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.1717