Highly Uniform Polycrystalline Silicon Thin Films Fabricated by Metal Plate Energy-Assisted Agent Method

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-06, Vol.47 (6R), p.4426
Main Authors: Lin, Chiung-Wei, Chen, Yi-Liang, Lee, Yeong-Shyang, Yeh, Yung-Hui
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.4426