Resolution Enhancement of Extreme Ultraviolet Microscope Using an Extreme Ultraviolet Beam Splitter

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-06, Vol.47 (6S), p.4872
Main Authors: Osugi, Masafumi, Tanaka, Kazuumi, Sakaya, Noriyuki, Hamamoto, Kazuhiro, Watanabe, Takeo, Kinoshita, Hiroo
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.4872