Temperature Dependence of Dielectric Constant of Nanoparticle Composite Porous Low-k Films Fabricated by Pulse Radio Frequency Discharge with Amplitude Modulation

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-08, Vol.47 (8S2), p.6875
Main Authors: Iwashita, Shinya, Morita, Michihito, Matsuzaki, Hidefumi, Koga, Kazunori, Shiratani, Masaharu
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.6875