Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-09, Vol.47 (9R), p.7464
Main Authors: Kanda, Kazuhiro, Igaki, Jun-ya, Saikubo, Akihiko, Kometani, Reo, Suzuki, Tsuneo, Niihara, Koichi, Saitoh, Hidetoshi, Matsui, Shinji
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.7464