Crystalline Structure of Highly Piezoelectric (K,Na)NbO 3 Films Deposited by RF Magnetron Sputtering

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2008-12, Vol.47 (12R), p.8909
Main Authors: Shibata, Kenji, Oka, Fumihito, Nomoto, Akira, Mishima, Tomoyoshi, Kanno, Isaku
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.8909