Anomalous Increase in Resistivity of Boron-Doped Silicon Film after Solid Phase Crystallization

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2009-03, Vol.48 (3S2), p.3
Main Authors: Miyahira, Tomoyuki, Kawai, Kenji, Noguchi, Takashi, Suzuki, Toshiharu, Sato, Masateru
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.48.03B016