Porous Low-k Impacts on Performance of Advanced LSI Devices with GHz Operations

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2009-04, Vol.48 (4S), p.4
Main Authors: Tada, Munehiro, Inoue, Naoya, Kawahara, Jun, Yamamoto, Hironori, Ito, Fuminori, Fukai, Toshinori, Ueki, Makoto, Miyake, Shinichi, Takeuchi, Tsuneo, Saito, Shinobu, Tagami, Masayoshi, Furutake, Naoya, Hijioka, Kenichiro, Ito, Takatoshi, Shibue, Yasuo, Senou, Takefumi, Ikeda, Rikikazu, Okada, Norio, Hayashi, Yoshihiro
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.48.04C031