Metrology of Wide Field of View Nano-Thickness Foils' Homogeneity by Conventional and Phase Contrast Soft X-ray Imaging

• Published in: Japanese Journal of Applied Physics 2010-06, Vol.49 (6), p.06GK03-06GK03-5
• Main Authors: Faenov, Anatoly, Pikuz, Tatiana, Fukuda, Yuji, Kando, Masaki, Kotaki, Hideyuki, Homma, Takayuki, Kawase, Keigo, Skobelev, Igor, Gasilov, Sergei, Kawachi, Tetsuya, Daido, Hiroyuki, Tajima, Toshiki, Kato, Yoshiaki, Bulanov, Sergei
• Format: Article
• Language: English
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.49.06GK03

A tabletop ultra-bright, debris-free femtosecond-laser-driven cluster-based plasma soft X-ray source, which emits more than $10^{12}$ photons/(sr$\cdot$pulse) in the spectral range 1--10 nm within a $4\pi$ sr solid angle was developed. Using such source in combination with a high dynamic range LiF crystal soft X-ray detector allows obtaining contact and propagation-based phase-contrast images of nanostructures with 700 nm spatial resolutions in a wide field of view. It was demonstrated that the high precision of used techniques enable distinguishing inhomogeneity of measured intensities of ultrathin foils in the order of $\pm 3$%. All of this opens a new approach for PBPC imaging and metrology of full areas of free-standing or mesh-supported nano-thickness foils, or other nanostructures.