Fabrication of a Wheatstone-Bridge Integrated SU-8 Cantilever

We describe the design and fabrication of an SU-8 cantilever with an integrated Wheatstone-bridge configuration. A photolithographic process of SU-8 on an anisotropically wet-etched Si substrate is used to produce reliable sharp tips. Changes in the surface stress on the cantilever are detected by a...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2010-06, Vol.49 (6), p.06GN01-06GN01-4
Main Authors: Ahn, Jun-Hyung, Park, Chang-Sin, Lee, Dong-Weon
Format: Article
Language:English
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Summary:We describe the design and fabrication of an SU-8 cantilever with an integrated Wheatstone-bridge configuration. A photolithographic process of SU-8 on an anisotropically wet-etched Si substrate is used to produce reliable sharp tips. Changes in the surface stress on the cantilever are detected by an integrated Au piezoresistor. Preliminary results of the measurement are presented for cantilever evaluation. The fabricated SU-8 cantilever has a resonance frequency of about 4.5 kHz, which yields a spring constant of approximately 0.15 N/m. These cantilevers are very suitable for the nondestructive atomic force microscope (AFM) analysis of fragile biological samples, such as cells and body fluids.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.49.06GN01