ON-State Reliability of Solid-Electrolyte Switch under Pulsed Alternating Current Stress for Programmable Logic Device

In this paper, we describes the ON-state reliability of a nonvolatile solid-electrolyte switch for a programmable logic device (PLD). The ON-state requirement for this application is different from that of a Cu via or an interconnect, since the pulsed-AC current is applied to the switch when the vol...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-07, Vol.50 (7), p.074201-074201-5
Main Authors: Banno, Naoki, Sakamoto, Toshitsugu, Tada, Munehiro, Miyamura, Makoto, Okamoto, Koichiro, Hada, Hiromitsu, Aono, Masakazu
Format: Article
Language:English
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Summary:In this paper, we describes the ON-state reliability of a nonvolatile solid-electrolyte switch for a programmable logic device (PLD). The ON-state requirement for this application is different from that of a Cu via or an interconnect, since the pulsed-AC current is applied to the switch when the voltage changes in the interconnect. We experimentally demonstrate a recovering phenomenon in the migration under AC stress and propose an appropriate ON-state resistance of 800 $\Omega$ to satisfy the requirement for a current density criterion that goes beyond the 28-nm technology node (hp28). The ON-state duration of the crossbar switch under the pulsed-AC current of 1 GHz is estimated to be over 10 years at an ambient of 150 °C.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.50.074201