Design and Finite Element Method Analysis of Laterally Actuated Multi-Value Nano Electromechanical Switches

We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders t...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-09, Vol.50 (9), p.094301-094301-9
Main Authors: Kloub, Hussam A, Smith, Casey E, Hussain, Muhammad M
Format: Article
Language:English
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Summary:We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.50.094301