Sensitivity of Surface Acoustic Wave Magnetic Sensors Composed of Various Ni Electrode Structures

A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a magnetostrictive Ni electrode and an ST-cut 90°X quartz substrate was fabricated. In this study, in order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of three kinds of Ni electrode stru...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2012-07, Vol.51 (7), p.07GC21-07GC21-5
Main Authors: Kadota, Michio, Ito, Shigeo
Format: Article
Language:English
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Summary:A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a magnetostrictive Ni electrode and an ST-cut 90°X quartz substrate was fabricated. In this study, in order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of three kinds of Ni electrode structures on the ST-cut 90°X quartz, namely, (a) grooved Ni electrodes, (b) additional overlaid Ni films on grooved Ni electrodes, and (c) Ni electrodes on the quartz, were fabricated and measured. In addition to these, a SAW resonator composed of a magnetostrictive TbFe 2 film electrode, which has a larger magnetostrictivity than the Ni film, on the ST-cut 90°X quartz was also fabricated. Their characteristics are examined.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.51.07GC21