Merits of Batch ALD

An overview of the merits and applications of batch ALD in a vertical furnace will be presented. We address new material and process developments and throughput enhancement which are key factors for future high-volume manufacturing applications. We present ALD SbOx as a new material on the batch pla...

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Bibliographic Details
Published in:ECS transactions 2014-08, Vol.64 (9), p.35-49
Main Authors: Dingemans, Gijs, Jongbloed, Bert, Knaepen, Werner, Pierreux, Dieter, Jdira, Lucian, Terhorst, Herbert
Format: Article
Language:English
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Summary:An overview of the merits and applications of batch ALD in a vertical furnace will be presented. We address new material and process developments and throughput enhancement which are key factors for future high-volume manufacturing applications. We present ALD SbOx as a new material on the batch platform. For the workhorse ALD Al2O3 and TiN materials, experimental and simulation results demonstrate that a reduction in cycle time to
ISSN:1938-5862
1938-6737
DOI:10.1149/06409.0035ecst