(Invited) Multifunctional Technology with Monolithic Integrated THz-, Photonic- and µ-Fluidic Modules

In this paper we present a multifunctional technology platform with different monolithic integrated modules like THz devices, i.e. complementary SiGe heterojunction bipolar transistors, silicon photonics components in particular Ge-PIN photo detectors and finally the wafer-level integration of µ-flu...

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Published in:ECS transactions 2015-09, Vol.69 (10), p.47-54
Main Authors: Mai, Andreas, Lischke, Stefan, Wietstruck, Matthias, Zimmermann, Lars, Kaynak, Mehmet, Tillack, Bernd
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container_issue 10
container_start_page 47
container_title ECS transactions
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creator Mai, Andreas
Lischke, Stefan
Wietstruck, Matthias
Zimmermann, Lars
Kaynak, Mehmet
Tillack, Bernd
description In this paper we present a multifunctional technology platform with different monolithic integrated modules like THz devices, i.e. complementary SiGe heterojunction bipolar transistors, silicon photonics components in particular Ge-PIN photo detectors and finally the wafer-level integration of µ-fluidic channels for sensor applications. Challenges during the monolithic integration of these different modules were reviewed and necessary process adaptations discussed in order to enable a co-integration.
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title (Invited) Multifunctional Technology with Monolithic Integrated THz-, Photonic- and µ-Fluidic Modules
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