Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding

The effect of bond anneal in Si-Si direct bonding of laminates with thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity during bond anneal leads to plastic deformation of the membrane. By controlling t...

Full description

Saved in:
Bibliographic Details
Published in:ECS transactions 2016-08, Vol.75 (9), p.311-319
Main Authors: Poppe, Erik, Jensen, Geir Uri, Moe, Sigurd Teodor, Wang, Dag
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The effect of bond anneal in Si-Si direct bonding of laminates with thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity during bond anneal leads to plastic deformation of the membrane. By controlling the cavity pressure it is found that the Si crystal of the membrane can be kept intact during bond anneal.
ISSN:1938-5862
1938-6737
DOI:10.1149/07509.0311ecst