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Morphology and Composition of Cu 2 S Ultra-Thin Films Deposited by E-ALD
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Published in: | ECS transactions 2017-10, Vol.80 (10), p.749-756 |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 1938-6737 1938-5862 |
DOI: | 10.1149/08010.0749ecst |