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Morphology and Composition of Cu 2 S Ultra-Thin Films Deposited by E-ALD

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Bibliographic Details
Published in:ECS transactions 2017-10, Vol.80 (10), p.749-756
Main Authors: Russo, Francesca, Giaccherini, Andrea, Salvietti, Emanuele, Berretti, Enrico, Passaponti, Maurizio, Lavacchi, Alessandro, Montegrossi, Giordano, Piciollo, Emanuele, Di Benedetto, Francesco, Innocenti, Massimo
Format: Article
Language:English
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ISSN:1938-6737
1938-5862
DOI:10.1149/08010.0749ecst