Two-Inch Aluminum Nitride (AIN) Single Crystal Growth for Commercial Applications

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Bibliographic Details
Published in:ECS transactions 2021-10, Vol.104 (7), p.37-48
Main Authors: Bondokov, Robert T, Branagan, Sean P., Ishigami, Naoki, Grandusky, James, Nagatomi, Takaharu, Tatsuta, Kazuo, Miebach, Thomas, Chen, Jianfeng (Jeff)
Format: Article
Language:English
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ISSN:1938-5862
1938-6737
DOI:10.1149/10407.0037ecst