(Invited) Selective Area Etching and Doping of GaN for High-Power Applications

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Bibliographic Details
Published in:ECS transactions 2021-10, Vol.104 (7), p.103-112
Main Authors: Li, Bingjun, Wang, Sizhen, Chang, Alexander S., Lauhon, Lincoln, Liu, Yafei, Raghothamachar, Balaji, Dudley, Michael, Han, Jung
Format: Article
Language:English
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ISSN:1938-5862
1938-6737
DOI:10.1149/10407.0103ecst