(Invited) Potential of Silicon Oxide Films for Low-Cost and High-Performance Resistive Switching Devices

This paper reviews our experimental studies on the resistive switching behaviors of sputter-deposited Si oxide films. Theoretical simulations are also demonstrated to elucidate the physical mechanisms of resistive switching behaviors. These suggest the various potential applications for low-energy s...

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Bibliographic Details
Published in:ECS transactions 2023-05, Vol.111 (1), p.123-133
Main Author: Omura, Yasuhisa
Format: Article
Language:English
Online Access:Get full text
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Summary:This paper reviews our experimental studies on the resistive switching behaviors of sputter-deposited Si oxide films. Theoretical simulations are also demonstrated to elucidate the physical mechanisms of resistive switching behaviors. These suggest the various potential applications for low-energy sensor network systems, neuromorphic computing systems and low-cost commercial electronic systems.
ISSN:1938-5862
1938-6737
DOI:10.1149/11101.0123ecst