Crystal surface defects and oxygen gettering in thermally oxidized bonded SOI wafers

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2001, Vol.148 (2), p.G36-G42
Main Authors: PAPAKONSTANTINOU, P, SOMASUNDRAM, K, CAO, X, NEVIN, W. A
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Growth from melts
zone melting and refining
Materials science
Methods of crystal growth
physics of crystal growth
Physics
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1337608