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The application of ozone in semiconductor cleaning processes : The solubility issue

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 2001-09, Vol.148 (9), p.G487-G493
Main Authors:	DE SMEDT, F, DE GENDT, S, HEYNS, M. M, VINCKIER, C
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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