Polytype Controlled SiC Epitaxy on On-axis 6H-SiC(0001) by Adding HCl during Growth

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2000-08, Vol.3 (8), p.381
Main Author: Xie, Z. Y.
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.1391154