Modeling microdefect formation in Czochralski silicon

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Published in:Journal of the Electrochemical Society 1999-06, Vol.146 (6), p.2300-2312
Main Authors: SINNO, T, BROWN, R. A
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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creator SINNO, T
BROWN, R. A
description
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source Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
subjects Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Modeling microdefect formation in Czochralski silicon
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