Etching of deep macropores in 6 in. Si wafers

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2000-07, Vol.147 (7), p.2757-2761
Main Authors: VAN DEN MEERAKKER, J. E. A. M, ELFRINK, R. J. G, ROOZEBOOM, F, VERHOEVEN, J. F. C. M
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1393602