Enhanced silicon oxidation by a hyperthermal beam obtained from laser evaporation of solid ozone

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2002-05, Vol.149 (5), p.F29-F34
Main Authors: NISHIGUCHI, Tetsuya, MORIKAWA, Yoshiki, KEKURA, Mitsuru, MIYAMOTO, Masaharu, NONAKA, Hidehiko, ICHIMURA, Shingo
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1464138