Effects of nonionic surfactants on oxide-to-polysilicon selectivity during chemical mechanical polishing

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2002-08, Vol.149 (8), p.G477-G481
Main Authors: LEE, Jae-Dong, PARK, Young-Rae, BO UN YOON, HAN, Yong-Pil, HAH, Sangrok, MOON, Joo-Tae
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1488650