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Tribological issues and modeling of removal rate of low-k films in CMP

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2004, Vol.151 (3), p.G205-G215
Main Authors: THAGELLA, Swetha, SIKDER, Arun K, KUMAR, Ashok
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1643746