Additives for Superconformal Electroplating of Ag Thin Film for ULSIs

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2004, Vol.7 (10), p.C118
Main Authors: Ahn, Eung Jin, Kim, Jae Jeong
Format: Article
Language:English
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ISSN:1099-0062
DOI:10.1149/1.1793811