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Transmission electron microscopy and spectroscopic ellipsometry studies of damage layer induced by large tilt angle ion implantation

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1996-08, Vol.143 (8), p.2636-2640
Main Authors:	HE, Z, CRISTIANO, F, ZHOU, Z, QIAN, Y, CHEN, L, LIN, C, HEMMENT, P. L. F, ZOU, S
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in germanium and silicon Exact sciences and technology Physics Structure of solids and liquids crystallography
Citations:	Items that cite this one
Online Access:	Get full text
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