Ar plasma-induced damage in AlGaAs

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1996-09, Vol.143 (9), p.L219-L221
Main Authors: STRADTMANN, R. R, LEE, J. W, ABENATHY, C. R, PEARTON, S. J, HOBSON, W. S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1837093