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Influence of cooling condition during crystal growth of CZ-Si on oxide breakdown property

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1996-10, Vol.143 (10), p.3383-3388
Main Authors:	IWASAKI, T, TSUMORI, Y, NAKAI, K, HAGA, H, KOJIMA, K, NAKASHIZU, T
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Testing, measurement, noise and reliability
Citations:	Items that cite this one
Online Access:	Get full text
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