Trap generation in buried oxides of silicon-on-insulator structures by vacuum ultraviolet radiation

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1997-02, Vol.144 (2), p.749-753
Main Authors: AFANAS'EV, V. V, STESMANS, A, REVESZ, A. G, HUGHES, H. L
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Testing, measurement, noise and reliability
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.1837479