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Dry etch patterning of LaCaMnO3 and SmCo thin films

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1998-07, Vol.145 (7), p.2512-2516
Main Authors:	WANG, J. J, CHILDRESS, J. R, PEARTON, S. J, SHARIFI, F, DAHMEN, K. H, GILLMAN, E. S, CADIEU, F. J, RANI, R, QIAN, X. R, LI CHEN
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Magnetic and optical mass memories Storage and reproduction of information
Citations:	Items that cite this one
Online Access:	Get full text
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