Nucleation and crystallization characteristics of phosphorus-doped amorphous silicon slit nano wire

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1994-05, Vol.141 (5), p.1392-1397
Main Authors: WADA, Y, KOBAYASHI, T, KURE, T, YOSHIMURA, T, SUDOU, Y, GOTOU, Y, KONDO, S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2054931