Growth Defect Observation with Pyramidal Hillock and Reduction by Photoexcited Hydrogen in Si CVD with SiH2Cl2

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1994-09, Vol.141 (9), p.2567-2572
Main Authors: Takakuwa, Yuji, Mazumder, Motaharul Kabir, Miyamoto, Nobuo
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2055164