Fabrication of Submicron Gratings for 1.5 μm InGaAsP / InP Distributed Feedback Lasers by Reactive Ion Etching Using  C 2 H 6 /  H 2

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1992-10, Vol.139 (10), p.2969-2974
Main Authors: Sugimoto, Hiroshi, Abe, Yuji, Ohishi, Toshiyuki, Ohtsuka, Ken‐ichi, Matsui, Teruhito, Yoshiyasu, Hajimu, Nomura, Yoshinori
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2069017