Loading…

A Reflectometric Study of the Reaction between Si and WF 6 during W‐LPCVD on Si and of the Renucleation during the H 2 Reduction of WF 6

Saved in:

Bibliographic Details
Published in:	Journal of the Electrochemical Society 1991-03, Vol.138 (3), p.783-788
Main Authors:	Holleman, J., Hasper, A., Middelhoek, J.
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!