Loading…

Refractive index profiles of thermally grown and chemically vapor deposited films on silicon

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1990-11, Vol.137 (11), p.3536-3541
Main Authors: CHONGSAWANGVIROD, S, IRENE, E. A, KALNITSKY, A, TAY, S. P, ELLUL, J. P
Format: Article
Language:English
Subjects:
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2086263