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Refractive index profiles of thermally grown and chemically vapor deposited films on silicon
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Published in: | Journal of the Electrochemical Society 1990-11, Vol.137 (11), p.3536-3541 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0013-4651 1945-7111 |
DOI: | 10.1149/1.2086263 |