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Oxidation of Plasma‐Deposited α ‐ Si x C 1 − x : H Films

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1990-07, Vol.137 (7), p.2266-2271
Main Authors:	Eldridge, J. M., Moore, J. O., Olive, G., Dunton, V.
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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