Reaction of  CVD  ‐ WSi x Film and Al Film

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1989-11, Vol.136 (11), p.3467-3471
Main Authors: Kobayashi, Ikuro, Shioya, Yoshimi, Matsuda, Yoshihiro, Yanagida, Kimio
Format: Article
Language:English
Online Access:Get full text
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096473