Annealing and Ion‐Implantation Effects in Semi‐Insulating GaAs Wafers Obtained from Photo‐Induced Microwave Reflectometry

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1989-12, Vol.136 (12), p.3795-3800
Main Authors: Gutmann, R. J., Campbell, C. S., Heimlich, M. C., Borrego, J. M., Bliss, D.
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096550