STEM-EDX dopant profiling of S-D implants in submicron FETs

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1989-12, Vol.136 (12), p.3828-3836
Main Authors: RENTELN, P, AST, D. G, MELE, T. C, KRUSIUS, J. P
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096557