Behavior and detection of particles in vacuum processes

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1989-02, Vol.136 (2), p.497-502
Main Authors: BOWLING, R. A, LARRABEE, G. B
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of crystal growth
physics of crystal growth
Physics
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096667