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EBIC study of silicon on insulator structures formed by high dose nitrogen implantation

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1989-03, Vol.136 (3), p.876-878
Main Authors:	KWOR, R, MATSON, R. J, AL-JASSIM, M. M, POLCHLOPEK, S, HEMMENT, P. L. F, REESON, K. J
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Ion radiation effects Physical radiation effects, radiation damage Physics Structure of solids and liquids crystallography
Citations:	Items that cite this one
Online Access:	Get full text
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