Analysis and reduction of surface damage in silicon following hydrogen passivation

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 1989-04, Vol.136 (4), p.1201-1205
Main Authors: GREGORY, J. A, VAYMAN, Z. Y, HANOKA, J. I
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Mechanical and acoustical properties
adhesion
Physics
Solid surfaces and solid-solid interfaces
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096853