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Growth characteristics of CVD beta-silicon carbide

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1987-12, Vol.134 (12), p.3145-3149
Main Authors:	CHENG, D. J, SHYY, W. J, KUO, D. H, HON, M. H
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Citations:	Items that cite this one
Online Access:	Get full text
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