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Study of bias-dependent etching of Si in aqueous KOH

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Bibliographic Details
Published in:	Journal of the Electrochemical Society 1987-02, Vol.134 (2), p.404-409
Main Authors:	PALIK, E. D, GLEMBOCKI, O. J, HEARD, I. JR
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid-fluid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Citations:	Items that cite this one
Online Access:	Get full text
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