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Oxidation of silicon using lamp light radiation

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1986-03, Vol.133 (3), p.652-654
Main Authors: SATO, Y, KIUCHI, K
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2108647